JPS5633210U - - Google Patents

Info

Publication number
JPS5633210U
JPS5633210U JP11568979U JP11568979U JPS5633210U JP S5633210 U JPS5633210 U JP S5633210U JP 11568979 U JP11568979 U JP 11568979U JP 11568979 U JP11568979 U JP 11568979U JP S5633210 U JPS5633210 U JP S5633210U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11568979U
Other languages
Japanese (ja)
Other versions
JPS579287Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11568979U priority Critical patent/JPS579287Y2/ja
Publication of JPS5633210U publication Critical patent/JPS5633210U/ja
Application granted granted Critical
Publication of JPS579287Y2 publication Critical patent/JPS579287Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Framework For Endless Conveyors (AREA)
JP11568979U 1979-08-24 1979-08-24 Expired JPS579287Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11568979U JPS579287Y2 (en]) 1979-08-24 1979-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11568979U JPS579287Y2 (en]) 1979-08-24 1979-08-24

Publications (2)

Publication Number Publication Date
JPS5633210U true JPS5633210U (en]) 1981-04-01
JPS579287Y2 JPS579287Y2 (en]) 1982-02-23

Family

ID=29347922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11568979U Expired JPS579287Y2 (en]) 1979-08-24 1979-08-24

Country Status (1)

Country Link
JP (1) JPS579287Y2 (en])

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188709U (en]) * 1981-05-28 1982-11-30
JPS61207143U (en]) * 1985-06-18 1986-12-27
JPS6212509A (ja) * 1985-07-02 1987-01-21 Hitachi Electronics Eng Co Ltd ウェハ搬送装置
JPS62186640U (en]) * 1986-05-16 1987-11-27

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57188709U (en]) * 1981-05-28 1982-11-30
JPS61207143U (en]) * 1985-06-18 1986-12-27
JPS6212509A (ja) * 1985-07-02 1987-01-21 Hitachi Electronics Eng Co Ltd ウェハ搬送装置
JPS62186640U (en]) * 1986-05-16 1987-11-27

Also Published As

Publication number Publication date
JPS579287Y2 (en]) 1982-02-23

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